| 摘要 |
A method for manufacturing a magnetic sensor. The method includes forming a plurality of magnetic detection elements on a substrate to form a bridge circuit, forming a protective film that protects the magnetic detection elements on the substrate, forming a plurality of stress absorption grooves near each of the magnetic detection elements by etching the protective film to produce a multilayer substrate including the protective film, the stress absorption grooves, and the magnetic detection elements, packaging the multilayer substrate, and annealing the multilayer substrate prior to the packaging.
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