| 摘要 |
<p>PURPOSE: A suspension-based coater apparatus is provided to easily reach to a split nozzle and to simplify slit nozzle change process. CONSTITUTION: A suspension-based coater apparatus(100) comprises: a suspension type stage(110,110') for suspending a substrate; a chemical supply unit for supplying a chemical on the surface of the substrate from a slit nozzle; a grasping member(150) for gripping the substrate; a substrate transfer unit(140) which moves the substrate along a suspension type stage; and a movable substrate-return unit(170) which is movable to provide a working space.</p> |
