| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology of a cell type decompressed (vacuum) carburization furnace capable of realizing the decompressed carburization (vacuum) furnace for small lot multi-production with high reliability in a small space while maintaining the productivity of a continuous decompressed (vacuum) carburization furnace.SOLUTION: The cell type decompressed carburization furnace includes: a conveying chamber 5 filled with inert gas while the inside atmospheric pressure is kept at the low-temperature atmospheric pressure; a carburization diffusion chamber 9 arranged adjacent to the conveying chamber 5 to execute the carburization diffusion processing of an object 50 to be processed; a temperature-raising chamber 4 arranged adjacent to the conveying chamber 5 to raise the temperature of the object 50; and a temperature-dropping chamber 6 arranged adjacent to the conveying chamber 5 to drop the object 50. The temperature-raising chamber 4, the conveying chamber 5 and the temperature-dropping chamber 6 are arranged in this order from the upstream side to the downstream side of the conveying path of the object 50. The carburization diffusion chamber 9 is arranged aside the conveying path of the object 50. A first vacuum purge means is provided in the temperature-raising chamber 4, and a second vacuum purge means is provided in the temperature-dropping chamber 6. |
