ALUMINUM ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE, AND ALUMINUM ALLOY SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide an Al alloy film for a display device, the alloy film showing low contact resistance even when the film is directly connected to a transparent pixel electrode eliminating a barrier metal layer, and higher corrosion resistance against a developing solution or corrosion resistance against a peeling solution in a manufacturing process of the display device.SOLUTION: The Al alloy film is directly connected to a transparent conductive film on a substrate of the display device. The Al alloy film contains: 0.5 atomic% or less (but not 0 atomic%) of Ni and/or Co element belonging to a group A; 0.2 to 2.0 atomic% of Ge; and 3 atomic% or less (but not 0 atomic%) of Y and/or Zr element belonging to a group B.