| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing ITO which can efficiently obtain high purity ITO at a low cost.SOLUTION: A glass substrate to which ITO adheres such as a glass substrate of a flat panel display is heat-treated at 400°C or higher and lower than the melting temperature of the glass substrate for 30 seconds to 1 hour. After the heat-treatment, the glass substrate to which ITO adheres is subjected to rapid cooling treatment in water or in a cold atmosphere to thereby allow the ITO to be separated from the glass substrate by the difference between the coefficient of thermal expansion of the glass substrate and the coefficient of thermal expansion of the ITO. The ITO separated from the glass substrate after the rapid cooling treatment may be heated again at 400°C or higher. |
