| 摘要 |
A material measurement system (500) includes a THz generator including at least one laser source (111) for emitting optical pulses, the optical pulses coupled to a THz emitter (51) operable for emitting pulsed THz radiation at a sample location on material while being processed (14) by a manufacturing system. A receiver (52) is operable to receive the optical pulses and to detect reflected or transmitted THz radiation from the sample location (14) synchronously with the optical pulses and provide electrical detection signals. Synchronizing optics (112, 113, 114) is operable to receive the optical pulses from said laser and provide the optical pulses to both the receiver (52) and the THz emitter (51). A controller (25) includes at least one processor (87) for receiving the electrical detection signals and providing a processed electrical detection signal, and an analyzer (88) operable to determine at least one, and generally a plurality of properties of the material from the processed electrical detection signal. |
