VACUUM CONTROLLER FOR WAFER LOADING STABILITY

摘要

PURPOSE: A vacuum controller is provided to place a wafer in a slot of a boat in a stable state without damaging the wafer when loading the wafer. CONSTITUTION: A vacuum controller removes a wafer dislocation phenomenon generated due to a vacuum pressure remained in a vacuum line of a wafer transfer when loading a wafer(3) in a boat of a vertical furnace or accommodating the wafer in a wafer cassette. The apparatus comprises: a vacuum line(1) where a vacuum pressure is induced in the line, connected to a vacuum pump; a main electronic valve(2) opening and closing the vacuum line selectively, and being installed in the vacuum line; a tweezer(4) absorbing the wafer by a vacuum pressure through the vacuum line; a vacuum sensor(5) detecting whether the wafer is absorbed to the tweezer; and a sub electronic valve(6) which is closed when the main electronic valve is opened and is opened when the main electronic valve is closed.