发明名称 MOUNTING PROCESSING WORK DEVICE, MOUNTING PROCESSING WORK METHOD AND DISPLAY SUBSTRATE MODULE ASSEMBLY LINE
摘要 PROBLEM TO BE SOLVED: To provide a mounting processing work device that reduces the degradation of alignment accuracy due to attitude such as deflection, warpage or the like of a substrate, or a mounting processing work method, and to provide a display substrate module assembly line that is high in the yield by adopting the configuration of a line having the mounting processing work device or the mounting processing work method.SOLUTION: A display substrate is floated from a reference base 20 supporting a substrate from lower side to correct alignment error due to attitude such as deflection, warpage or the like of a processing side when aligning a display substrate P, or a warpage angle is found to correct the attitude, and then alignment is conducted.
申请公布号 JP2011018774(A) 申请公布日期 2011.01.27
申请号 JP20090162381 申请日期 2009.07.09
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 YAMAZAKI FUJIO;MIURA KOICHIRO;WATANABE YUTAKA
分类号 H01L21/60 主分类号 H01L21/60
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