| 摘要 |
PROBLEM TO BE SOLVED: To simplify a structure of a force detection device for detecting a force working in a prescribed direction in an XYZ three-dimensional coordinate system.SOLUTION: Between an upper substrate 10 and a lower substrate 20 parallel to the XY plane, a first columnar member P1 and a second columnar member P2 are disposed as shown in Fig. (a). The upper end of each columnar member P1 or P2 is connected to the upper substrate 10 via an upper film 11 or 12, and the lower end is connected to the lower substrate 20 via a conductive lower film 21 or 22. Each columnar members P1 or P2 is tilted mutually oppositely with respect to vertical reference axes R1 and R2. When a rightward force +Fx is applied to the upper substrate 10 and the upper substrate slides rightward as shown in Fig. (b), the columnar member P1 tilts in a laying-down direction and the lower film 21 is deformed upward, and the columnar member P2 tilts in a rising direction and the lower film 22 is deformed downward. Based on a difference in capacitance value between a capacitive element consisting of the lower film 21 and an electrode E5 and a capacitive element consisting of the lower film 22 and an electrode E6, the force Fx in the X-axis direction is detected. By summing both capacitance values, a force Fz in the Z-axis direction can also be detected. |
