发明名称 STORAGE AND DELIVERY SYSTEM FOR GASEOUS COMPOUNDS
摘要 <p>A laser system utilizing a fluid as the excitatory medium for stimulated light emission, wherein the fluid is supplied from a sorbent-based fluid storage and dispensing system coupled in fluid-supplying relationship with the laser apparatus. The laser may be an excimer laser utilizing as the laser working fluid a rare gas halide compound such as fluorides and/or chlorides of krypton, xenon and argon, as well as fluorine and/or chlorine per se. The laser system may alternatively be a far infrared gas laser utilizing a gas such as CO2, N2O, CD3OD, CH3OD, CH3OH, CH3NH2, C2H2F2, HCOOH, CD3I, CH3F, and C13H3F. Laser systems of the present invention may be utilized in applications such as materials processing, measurement and inspection, reading, writing, and recording of information, holography, communications, displays, spectroscopy and analytical chemistry, remote sensing, surveying, marking, and alignment, surgical and medical applications, plasma diagnostics, laser weaponry, laser-induced nuclear fusion, isotope enrichment and atomic physics.</p>
申请公布号 EP0785817(B1) 申请公布日期 2000.08.30
申请号 EP19950936302 申请日期 1995.10.13
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 TOM, GLENN, M.;MCMANUS, JAMES, V.
分类号 B01D53/04;B01J4/02;B01J20/18;B01J20/20;F17C11/00;(IPC1-7):B01D53/04;F17C13/04 主分类号 B01D53/04
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