| 发明名称 |
MEMS Component, Method for Producing a MEMS Component, and Method for Handling a MEMS Component |
| 摘要 |
A MEMS component includes a substrate in which at least one cavity is present. The cavity is closed off toward an active side of the substrate. An inactive side is arranged opposite the active side of the substrate, and the substrate is covered with a covering film on the inactive side.
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| 申请公布号 |
US2011018076(A1) |
申请公布日期 |
2011.01.27 |
| 申请号 |
US20100842677 |
申请日期 |
2010.07.23 |
| 申请人 |
PAHL WOLFGANG;FEIERTAG GREGOR;LEIDL ANTON |
发明人 |
PAHL WOLFGANG;FEIERTAG GREGOR;LEIDL ANTON |
| 分类号 |
H01L29/84;H01L21/02;H01L21/50 |
主分类号 |
H01L29/84 |
| 代理机构 |
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代理人 |
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