METHOD FOR PRODUCING COATINGS WITH A SINGLE COMPOSITE TARGET
摘要
The invention pertains to a method for the production of coatings by physical vapor deposition (PVD), wherein a binary target or a target with more than two constituents is evaporated in a curvilinear cathodic arc discharge, causing the ions with different masses (elements) to be splitted and the ion splitting results in variations for the ratio of the different masses (elements) at different positions in the deposition chamber.
申请公布号
WO2011009573(A1)
申请公布日期
2011.01.27
申请号
WO2010EP04365
申请日期
2010.07.16
申请人
OERLIKON TRADING AG, TRUEBACH;RAMM, JUERGEN;WIDRIG, BENO;RUDIGIER, HELMUT