SHOWER HEAD FOR CHEMICAL VAPOR DEPOSITION, AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A shower head for chemical vapor deposition, and a manufacturing method thereof are provided to minimize the spreading of a filler metal from a shower head by combining a tube with a supply line on the shower head. CONSTITUTION: A shower head for chemical vapor deposition comprises a shower head main body(110), a supply line(130), and a tube. The supply line is formed on the shower head body to supply a material. The tube is inserted into the supply line. The supply line and the tube are combined through vacuum brazing.