发明名称 Micro-processing method using a probe
摘要 A micro-processing method is provided for forming a structure adapted to confine electrons within a micro-region. The method comprises steps of arranging a probe oppositely relative to a non-electroconductive thin film arranged on an electroconductive substrate, placing the probe on or near the surface to be processed of the non-electroconductive thin film, applying a voltage between the probe and the substrate to form an enhanced electroconductivity region as compared with the remaining area in the non-electroconductive thin film, and oxidizing the interface of the substrate and the non-electroconductive thin film.
申请公布号 US6166386(A) 申请公布日期 2000.12.26
申请号 US19980088758 申请日期 1998.06.02
申请人 CANON KABUSHIKI KAISHA 发明人 YANO, KOJI;KURODA, RYO
分类号 B81C1/00;B82B3/00;G01Q80/00;H01J37/30;H01J37/317;H01L21/00;(IPC1-7):H01L21/00 主分类号 B81C1/00
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