MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF,申请号EP20090739573-传众专利搜索

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发明名称	MOLYBDENUM-NIOBIUM ALLOYS, SPUTTERING TARGETS CONTAINING SUCH ALLOYS, METHODS OF MAKING SUCH TARGETS, THIN FILMS PREPARED THEREFROM AND USES THEREOF
摘要
申请公布号	EP2277191(A1)	申请公布日期	2011.01.26
申请号	EP20090739573	申请日期	2009.04.28
申请人	H. C. STARCK, INC.	发明人	SUN, SHUWEI;KUMAR, PRABHAT;SCHMIDT-PARK, OLAF;WU, RONG-CHEIN, RICHARD;ROZAK, GARY;GAYDOS, MARK
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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