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发明名称
MEMS DEVICES
摘要
申请公布号
EP2277185(A1)
申请公布日期
2011.01.26
申请号
EP20090746214
申请日期
2009.05.07
申请人
NXP B.V.
发明人
STEENEKEN, PETER, G.;SUY, HILCO;GOOSSENS, MARTIJN
分类号
H01H1/00;H01H59/00
主分类号
H01H1/00
代理机构
代理人
主权项
地址
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