| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam homogenizer capable of forming a rectangular shaped beam spot whose energy distribution in the long side direction is uniform on a surface to be irradiated without using optical lens to which high manufacturing accuracy is required. SOLUTION: In a beam homogenizer, a beam spot on a surface to be irradiated is formed in a rectangular shape having an aspect ratio of≥10, preferably,≥100. The beam homogenizer has an optical waveguide for uniformizing the rectangular shaped energy distribution in the long side direction. COPYRIGHT: (C)2005,JPO&NCIPI |
