| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method of a polishing surface plate capable of preventing resoiling of a polishing surface of a washed lower surface plate by washing water washing a polishing surface of an upper surface plate at the time of washing the polishing surfaces of the upper surface plate and the lower surface plate by injecting water from an injection nozzle moving along each of the polishing surfaces of the upper surface plate and the lower surface plate while rotating the upper surface plate and the lower surface plate provided on a both surface polishing device. SOLUTION: This washing method of the polishing surface plate constitutes its characteristic feature of washing the upward polishing surface of the lower surface plate 30 by injecting water from the injection nozzle 32b after washing the downward polishing surface of the upper surface plate 20 at the time of washing the upper surface plate 20 and the lower surface plate 30 by injecting water from the injection nozzles 32a, 32b moving along each of the polishing surfaces of the upper surface plate 20 and the lower surface plate 30 while rotating the upper surface plate 20 and the lower surface plate 30 provided on the both surface polishing device. |
