| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing pad capable of detecting a working terminal point without deteriorating a polishing characteristic. <P>SOLUTION: A through hole 3 to detect the working terminal point is provided so that a cross-section shape in the polishing direction is elliptical and the major axis direction is in parallel with the radial direction of the polishing pad 1, and a non-working part 4 on which a recessing work is not applied is provided on a peripheral part of this through hole 3. It is desirable that a major axis (a) is 4 to 8 mm and that a minor axis (b) is 3 to 5 mm as size of the through hole 3. It is desirable that a diameter (d) is 15 to 60 mm as size of the non-working part 4. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
