| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a slider pad in which fence structure is minimized and which has durability. SOLUTION: A photoresist layer 41 having void for forming a pad is formed on a slider body layer 43, and an adhesive layer 44 is deposited at a void part vertically. Successively, a pad layer 45 is formed, and a masking member 47 is deposited at the pad layer 45 vertically. A forming process of vertical film minimizes accumulation (fence) of masking layers and adhesive layer members for a void side wall of resist. After each layer for pad is formed, the resist 41 is stripped by a method including mechanical grinding. Successively, ashing processing is performed by plasma including oxygen. as the masking layer 46 does not protect fence structure 45F, 46F so as to be same as most part of the pad layer 45, the ashing processing eliminates the fence structure 45F, 46F. COPYRIGHT: (C)2005,JPO&NCIPI
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