| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing apparatus which has improved the processing rate by generating highly efficient active species without contamination of processing objects. SOLUTION: This processing apparatus decomposes a molecular gas including hydrogen atoms and oxygen atoms using a catalyst, and processes the processing objects using the gas generated through decomposition with such catalyst. This processing apparatus comprises a means for irradiating the catalyst with the light in the number of waves exceeding the work function of the catalyst. COPYRIGHT: (C)2005,JPO&NCIPI
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