| 摘要 |
Displacement interferometer has a light source for generating a light beam, and a beam splitter (111) for dividing the light beam into a reference beam and a measuring beam. A displacement converter (121) alters a progressing direction of the measuring beam, and transforms a displacement perpendicular to the progressing direction of the measuring beam into a path difference of the measuring beam. Independent claims are included for; (i) A displacement interferometer system, comprising a light source for generating a light beam; and (ii) An exposure system including two of the above interferometers. |
