发明名称 Surface acoustic wave device including an IDT defined by a metal filled in grooves in a piezoelectric substrate
摘要 A surface acoustic wave device includes a LiTaO3 substrate, and an IDT having a high reflection coefficient, which has a relatively high electromechanical coupling coefficient k2, and which can obtain superior resonance characteristics and/or filter characteristics. In a surface acoustic wave device in which a plurality of grooves is provided in an upper surface of a LiTaO3 substrate and an IDT having a plurality of electrode fingers made of a metal filled in the plurality of grooves, the following equation is satisfied: (&rgr;3×C44)1/2>1.95×1011, where &rgr; represents the density of the metal defining the IDT, and C44 represents the stiffness thereof.
申请公布号 US7876021(B2) 申请公布日期 2011.01.25
申请号 US20090629924 申请日期 2009.12.03
申请人 MURATA MANUFACTURING CO., LTD. 发明人 KADOTA MICHIO;NAKAO TAKESHI
分类号 H01L41/04 主分类号 H01L41/04
代理机构 代理人
主权项
地址