PURPOSE: An apparatus for cleaning a substrate is provided to prevent air leakage by combining a porous cleaning plate with a manifold through an insert block. CONSTITUTION: A substrate is entered into a substrate entry guide portion from outside. An impurity removing unit removes foreign material formed in a substrate supplied from the substrate entry guide portion. A foreign material cleaning unit washes away the foreign material remaining in the substrate provided from the impurity removing unit. A position controller controls the location of the substrate carried out from the foreign material cleaning unit. The foreign material cleaning unit comprises an insert block(250), a porous cleaning plate, and a manifold(201). The joint holes are formed in the insert block.
