THIN FILM FABRICATION BY SOLUTION PROCESS

摘要

PURPOSE: A thin film fabrication by a solution process is provided to form various electric elements on a plastic substrate or a macromolecular film by forming thin film or a pattern thin film under low temperature. CONSTITUTION: A precursor solution including metal or oxide precursor is prepared. The precursor solution is spread in the substrate(10) to form the thin film. A substrate in which the thin film is formed is transferred to a heat treatment unit(30). A microwave generation unit(35) supplies microwave to the thin film coated on the substrate, which is consecutively heat-treated.