MANUFACTURING METHOD FOR VERTICALLY ALIGNED NANOTUBES AND SENSOR STRUCTURE, AND A SENSOR ELEMENT MANUFACTURED THEREBY

摘要

PURPOSE: A method for manufacturing vertically aligned nanotubes is provided to obtain excellent performance at high temperature. CONSTITUTION: A method for manufacturing vertically aligned nanotubes comprises: a step of forming a polymer film on a substrate; a step of forming an AAO mask with pore structure on the film; a step of transferring the pore structure of the AAO mask to the polymer film by etching process; a step of removing the AAO mask; a step of forming a thin film on a polymer template; and a step of performing thermal decomposition to remove the polymer template.