COATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning device which removes adhered materials or foreign matters by an always stable action without directly touching the surface of an injection port of a coating head main body and the surface of its peripheral edge section. SOLUTION: A cleaning mechanism section comprises a filling mechanism section for filling the material in the coating head main body, and a surface cleaning mechanism section for cleaning by suction-removing the materials or foreign matters adhered to the surface of the injection port of the coating head main body and the surface of its peripheral edge section. The surface cleaning mechanism section cleans the surface of the coating head injection port and the peripheral edge section by different suction grooves. COPYRIGHT: (C)2006,JPO&NCIPI