发明名称 Method of operating and process for fabricating an electron source
摘要 A method of operating and process for fabricating an electron source. A conductive rod is covered by an insulating layer, by dipping the rod in an insulation solution, for example. The rod is then covered by a field emitter material to form a layered conductive rod. The rod may also be covered by a second insulating material. Next, the materials are removed from the end of the rod and the insulating layers are recessed with respect to the field emitter layer so that a gap is present between the field emitter layer and the rod. The layered rod may be operated as an electron source within a vacuum tube by applying a positive bias to the rod with respect to the field emitter material and applying a higher positive bias to an anode opposite the rod in the tube. Electrons will accelerate to the charged anode and generate soft X-rays.
申请公布号 US7875469(B2) 申请公布日期 2011.01.25
申请号 US20070001631 申请日期 2007.12.12
申请人 CABOT MICROELECTRONICS CORPORATION 发明人 BUSTA HEINZ H.
分类号 H01L21/00;H01J1/304;H01J1/62;H01J9/00;H01J9/02;H01J9/24;H01J35/06 主分类号 H01L21/00
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