发明名称 |
Differential waveguide probe |
摘要 |
A wafer probe comprises a contact conductively interconnected with the wall of a waveguide channel and supported by a substrate that projects from an end of a waveguide channel.
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申请公布号 |
US7876114(B2) |
申请公布日期 |
2011.01.25 |
申请号 |
US20080221828 |
申请日期 |
2008.08.07 |
申请人 |
CASCADE MICROTECH, INC. |
发明人 |
CAMPBELL RICHARD L.;ANDREWS MICHAEL |
分类号 |
G01R31/02;H01P1/00 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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