发明名称 Semiconductor wafer processing to increase the usable planar surface area
摘要 The invention provides a method for increasing the usable surface area of a semiconductor wafer having a substantially planar surface and a thickness dimension at right angles to said substantially planar surface, the method including the steps of selecting a strip thickness for division of the wafer into a plurality of strips, selecting a technique for cutting the wafer into the strips at an angle to the substantially planar surface, in which the combined strip thickness and width of wafer removed by the cutting is less than the thickness of the wafer, cutting the wafer into strips using the selected technique and separating the strips from each other.
申请公布号 US7875794(B2) 申请公布日期 2011.01.25
申请号 US20030432936 申请日期 2003.12.22
申请人 TRANSFORM SOLAR PTY LTD 发明人 WEBER KLAUS JOHANNES;BLAKERS ANDREW WILLIAM
分类号 H01L21/00;H01L21/306;B23K;B23K101/40;H01L;H01L21/301;H01L21/46;H01L21/4763;H01L21/50;H01L21/78;H01L31/00;H01L31/0236;H01L31/04;H01L31/05;H01L31/052;H01L31/068;H01L31/18 主分类号 H01L21/00
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