STRIPPER COMPOSITION FOR COPPER OR COPPER ALLOY INTERCONNECTION

摘要

PURPOSE: A stripper composition for copper or copper alloy interconnection is provided to simultaneously minimize the corrosion against a metal layer including copper or copper alloy and an insulating layer such as a silicon oxide layer and a silicon nitride layer without isopropanol. CONSTITUTION: A stripper composition for copper or copper alloy interconnection comprises (A) 0.1-30 weight% of a tertiary amine compound represented by chemical formula 1, (B) 0.01-10 weight% of azole compound, and (C) the remaining amount of organic solvent. In chemical formula 1, R1 is C1~C4 linear or branched hydroxyalkyl group, or C1~C4 linear or branched thiolalkyl group; R2 and R3 are respectively C1~C5 alkyl group, C1~C4 hydroxy alkyl group, C6~C10 aryl or C1~C4 alkoxy alkyl group; and n is a natural number of 0-4.