发明名称 Semiconductor device with contact stabilization between contact plugs and BIT lines and method for manufacturing the same
摘要 A semiconductor device includes a semiconductor substrate divided into a cell array region, a core region, and a peripheral region. Bit lines are formed in the respective regions. Storage node contact plugs are formed in the cell array region, and blocking patterns are simultaneously formed around the bit lines of the core region and the peripheral region. Capacitors are formed in the cell array region to come into contact with the storage node contact plugs, and metal contact plugs are formed to come into contact with the capacitors of the cell array region and the bit lines of the core region and the peripheral region. In the semiconductor device, even if the metal contact plugs are not aligned with the bit lines, the blocking pattern works to stabilize the contact between the metal contact plugs and the bit lines.
申请公布号 US7875526(B2) 申请公布日期 2011.01.25
申请号 US20100782903 申请日期 2010.05.19
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KOO DONG CHUL
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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