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发明名称
FOCUSED ION BEAM APPARATUS USING OPENING FEATURE AND MACHINING METHOD USING THEREOF
摘要
申请公布号
KR101010924(B1)
申请公布日期
2011.01.25
申请号
KR20080063469
申请日期
2008.07.01
申请人
发明人
分类号
B23K15/08;B23K15/00;H01J37/30
主分类号
B23K15/08
代理机构
代理人
主权项
地址
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