APPARATUS FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A semiconductor manufacturing device is provided to simultaneously process a great number of wafers than a conventional vertical furnace. CONSTITUTION: A tube has a process space inside. The tube has a vent(103) on one side. A boat goes in and out through the lower aperture of the tube. A nozzle(140a) is formed in order to horizontally spray process gas. After a susceptor is loaded, a boat is inserted into the tube. The tube is heated to maintain the internal temperature of the tube at setting temperature.