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发明名称
SEMICONDUCTOR SUBSTRATE, FIELD-EFFECT TRANSISTOR, AND THEIR MANUFACTURING METHODS
摘要
申请公布号
KR20070022402(A)
申请公布日期
2007.02.26
申请号
KR20077003511
申请日期
2007.02.14
申请人
发明人
分类号
H01L21/335
主分类号
H01L21/335
代理机构
代理人
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地址
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