| 摘要 |
PURPOSE: A drawing apparatus, a recording media, and a drawing method are provided to implement accurate correction by comparing correction amount based on different reference marks. CONSTITUTION: A raster conversion part(50) converts vector data into raster data. A reference position memory part(52) memorizes the setting position information of a reference mark formed on a substrate(12). A drawing position correction part(54) corrects drawing positions based on the position information displaying the position of reference marks. An exposure controller(58) controls an exposure head(30) based on corrected image data.
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