SUBSTRARE PROCESSING SYSTEM AND DATA RETRIEVAL METHOD

摘要

PURPOSE: A substrate processing system and a data retrieval method are provided to rapidly search data by non increasing data search load in a group management device even though the number of substrate processing systems or GUI(Graphic User Interface) terminals is increased. CONSTITUTION: Plural operating terminals(4) writes a data acquisition request format for a substrate processing device(2), and a group management device(4) develops the data acquisition request format of the substrate processing device. The group management device merges each display item searched based on the identical condition among the search conditions indicated in the developed data acquisition request format to write a merge table for each substrate processing device.