| 摘要 |
<p>PURPOSE: A substrate processing device is provided to improve energy efficiency and a substrate temperature property. CONSTITUTION: An entrance transfers a substrate(G) to the inside before a process. An exit takes out the substrate to the outside after a process. A heating part is arranged along a transfer path in order to heat the substrate at predetermined temperature. A cassette station(C/S)(14) is the cassette transfer port of a system(10).</p> |
