发明名称 PROCEDE DE FABRICATION D'UN MASQUE A OUVERTURES SUBMILLIMETRIQUES POUR GRILLE ELECTROCONDUCTRICE SUBMILLIMETRIQUE, MASQUE A OUVERTURE SUBMILLIMETRIQUES, GRILLE ELECTROCONDUCTRICE SUBMILLIMETRIQUE.
摘要 <p>A process for manufacturing a mask having submillimetric openings, in which: for a masking layer, a solution of colloidal nanoparticles that are stabilized and dispersed in a first solvent is deposited, the particles having a given glass transition temperature Tg, the drying of the masking layer is carried out at a temperature below the temperature Tg until a mask having a two-dimensional network of submillimetric openings is obtained with substantially straight mask area edges, in a zone referred to as a network mask zone, a zone free of masking is formed on the face by mechanical and/or optical removal of at least one peripheral portion of the network mask zone. The invention also relates to the network mask and the grid with an electroconductive solid zone that are thus obtained.</p>
申请公布号 FR2936358(B1) 申请公布日期 2011.01.21
申请号 FR20080056427 申请日期 2008.09.24
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 ZAGDOUN GEORGES;NGHIEM BERNARD;VALENTIN EMMANUEL;TCHAKAROV SVETOSLAV
分类号 H01L21/283;G02F1/1343;H01L23/60;H01L29/40;H01L31/042 主分类号 H01L21/283
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