NOVEL TITANIUM ALKOXIDE COMPOUNDS AND PROCESS FOR PREPARING METHOD THEREOF

摘要

PURPOSE: A method for preparing titanium alkoxide compound is provided to manufacture thermally stable titanium oxide thin film. CONSTITUTION: A titanium alkoxide compound is denoted by chemical formula 1(Ti(OCR^1R^2R^3)_4). In chemical formula 1, R1 and R2 are independently linear or branched alkyl group of C1-C5; and R3 is linear alkenyl or alkinyl group of C2-C5. A titanium alkoxide compound is prepared by reacting alcohol compound of chemical formula 3(HOCR^1R^2R^3) with titanium amide compound of chemical formula 4(Ti(NR^4R^5)_4). A titanium oxide thin film is manufactured using titanium alkoxide compound as a precursor by MOCVD(metal organic chemical vapor deposition) and ALD(atomic layer deposition).