Method of forming a contact plug in semiconductor device,申请号KR20070091510-传众专利搜索

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发明名称	Method of forming a contact plug in semiconductor device
摘要
申请公布号	KR101010467(B1)	申请公布日期	2011.01.21
申请号	KR20070091510	申请日期	2007.09.10
申请人		发明人
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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