| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized plasma generating apparatus with high plasma excitation efficiency.SOLUTION: This plasma generating apparatus 100 includes a microwave generating device 10 for generating a microwave, a slot antenna 21b to radiate the microwave generated by the microwave generating apparatus 10, a coaxial waveguide 20 having a coaxial structure composed of an inner tube 20a and an outer tube 20b to guide the microwave generated by the microwave generating device 10 to the slot antenna 21b mounted to one end of the inner tube 20a, a resonator 22 made of a dielectric material to support the slot antenna 21b, and a chamber 23 for plasma excitation, which has an open surface for the resonator 22 to be disposed, to which the microwave radiated from the slot antenna 21b through the resonator 22 is guided and a prescribed process gas is supplied, and in which the process gas is excited by the microwave. |
