FLUID CONTROL METHOD, FLUID CONTROL SYSTEM, AND FLUID CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a fluid control method capable of maintaining a split flow ratio of main gas to be split from a main line into first and second sublines constant before and after additive gas is supplied to one of the sublines.SOLUTION: In the method, a flow rate of the main gas to be supplied from the main line 17 to a chamber 31 through the first and second sublines 19 and 20 is controlled based on the pressure in each of the first and second sublines 19 and 20 when the additive gas is to be supplied to the second subline 20. The pressure in the first subline 19 not supplied with the additive gas is controlled to remain constant during supply of the additive gas to the second subline 20.