| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle plate for a liquid discharging head in which the discharging condition of ink is stable.SOLUTION: In the method for manufacturing a nozzle plate for the liquid discharging head in which the nozzle plate is constituted of an Si substrate having a through-hole, the through-hole has a first nozzle opening in one surface of the Si substrate and a second nozzle in communication with the first nozzle and having a crosssection which opens in the other surface side of the Si substrate and which is larger than the crosssection of the first nozzle, and the opening in the one surface of the first nozzle is designated as a discharging opening from which droplets are discharged, the method includes a first nozzle forming step of forming the first nozzle with a predetermined depth, and a second nozzle forming step of forming the second nozzle by using an etching mask covering a side surface of the one surface and an inner surface of the first nozzle, by carrying out etching by a Si isotropic dry etching method from the opening side of the one surface, and by causing a hole to penetrate to the side of the other surface side. |
