ARRAY OF ULTRASONIC TRANSDUCERS

摘要

PROBLEM TO BE SOLVED: To provide an improved ultrasonic transducer including a piezoelectric layer, having a high piezoelectric coupling coefficient k.SOLUTION: An array of ultrasonic transducers each includes a substrate (1); a film (2); a first electrode (4); a piezoelectric layer (5); and a second electrode (6), wherein the substrate (1) includes at least one opening (3) which adjoins the film (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The present invention, further, relates to an ultrasonic transducer and to a method of manufacturing an array of the ultrasonic transducers.