摘要 |
The method of assembling a light scanning apparatus is capable of fine-adjusting a scanning angle and resonance frequency of a mirror section. The method comprises: a step of measuring the scanning angle and resonance frequency of the mirror section, with actuating a vibration source, in a state where a substrate holding member is temporarily fixed on a base member; a step of moving the substrate holding member, in the longitudinal direction of a substrate after releasing the temporarily-fixed state of the substrate holding member; a step of fine-adjusting a substrate-holding position by repeating the step of moving the substrate holding member; and a step of fixing the substrate holding member after the substrate-holding position is set. The substrate-holding position of the substrate holding member provided on the base member can be varied, without varying the position of the mirror section with respect to the base member in the fine-adjusting step and said fixing step, when the light scanning apparatus is assembled.
|