发明名称 METHOD AND SYSTEM FOR MAKING THIN METAL FILMS
摘要 A method of forming a structure useful in all forms of deposited metals, elemental metals, metal alloys, metal compounds, metal systems, including refractory metals such as tungsten and tantalum is provided. The structure generally comprises a substrate, a first layer formed atop the substrate, and a second layer formed atop the first layer. The first layer comprises a metal, which can be chromium, gold, platinum, aluminum, nickel, or copper. The second layer comprises a metal, elemental metal, metal alloy, metal compound, or metal system comprising a refractory metal such as tungsten or tantalum. The substrate can be a silicon, quartz or glass, metal, metal oxide or nitride.
申请公布号 US2011014400(A1) 申请公布日期 2011.01.20
申请号 US20100651959 申请日期 2010.01.04
申请人 INNOSYS, INC. 发明人 HUANG JING-YI;SADWICK LAURENCE P.
分类号 C23C16/44;B05D1/36;B05D3/00;C23C14/14;C23C14/34 主分类号 C23C16/44
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