INTRACAVITY HARMONIC GENERATION USING A RECYCLED INTERMEDIATE HARMONIC

摘要

Lasers (300, 500, 600, 700, 800, 900) configured for intracavity harmonic generation of second (342) and higher order (352, 552, 652, 782) harmonic laser beam energy include mode-matching optics (360, 670, 910), such as a curved mirror, for recycling an unused portion of an intermediate harmonic laser beam energy (e.g., second harmonic laser beam energy) to improve higher order harmonic laser beam energy generation efficiency (e.g., third or higher order harmonic laser beam energy generation efficiency) without sacrificing beam quality of the higher order harmonic laser beam energy. The curved mirror may be positioned out of a resonant laser cavity (306) of the laser. A radius of curvature and a position of the curved mirror are selected so that a beam radius and a beam divergence of the recycled second harmonic laser beam energy are essentially the same as a beam radius and a beam divergence of incoming second harmonic laser beam energy everywhere along a beam path of the incoming second harmonic laser beam.