| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma reactor stably generating plasma discharge in a discharge space at a predetermined place at specified even time intervals using a plasma reacting structural body comprising a dielectric and a palisade electrode, and in addition facilitating the fabrication of the palisade electrode to decrease the manufacturing cost.SOLUTION: In the plasma reactor, the palisade electrodes 1, 2 are formed by a plurality of bars 6 and electric conductors 7 connecting them, and the bars 6 of the palisade electrodes 1, 2 facing each other are extended in different directions, and intersected. A plurality of plasma reacting structural bodies 5 each of which is formed by inserting the dielectric 3 between the palisade electrodes 1, 2 are arranged in parallel to form one layer or more of discharge spaces 10 capable of streaming gas G. The gas G is streamed in the discharge spaces 10 between the palisade electrodes 1, 2 and the dielectrics 3 or between the dielectrics 3 covering the palisade electrodes 1, 2 while generating plasma discharge by applying a voltage between the palisade electrodes 1, 2 to react the gas G. |
