发明名称 |
POLYSILAZANE TREATING SOLVENT AND METHOD FOR TREATING POLYSILAZANE USING THE SAME |
摘要 |
PURPOSE: A polysilazane treatment solvent is provided to enable use in edge cutting and backside rinsing due to high polysilazane solubility and to reduce the amount of gas generated from a waste liquid tank. CONSTITUTION: A polysilazane treatment solvent is a mixture of two or more of the following: toluene, heptanes, and etherified. The etherified material is selected from diethyl ether, ethyl phenyl ether, diisopropylether, diisopentylether, or their mixture. A method for treating polysilazane comprises the steps of: applying the polysilazane treatment solvent to a substrate(110); and removing polysilazane by spraying the polysilazane treatment solvent to the polysilazane(130) of filtrate(140) or protrusion.
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申请公布号 |
KR20110006586(A) |
申请公布日期 |
2011.01.20 |
申请号 |
KR20100032306 |
申请日期 |
2010.04.08 |
申请人 |
DNF CO., LTD. |
发明人 |
PARK, JEONG HYEON;BYUN, TAE SEOK;JEON, SANG YONG;SON, SEUNG;KWONE, YONG HEE;CHO, YIK HAENG;KIM, JIN DONG;KIM, MYONG WOON |
分类号 |
C09K13/00;C08L71/00;C11D7/24;H01L21/306 |
主分类号 |
C09K13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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